昆山Centrifugal cleaning machine

昆山Centrifugal cleaning machine

Model:Laser Grooving LFL-AB1200

Scope of application:Wafer, CMOS body, substrate, CCD shell powder, impurity holder, Holder + IR, lens, VCM and other removal operations

Consultation

Introduce

It has the characteristics of high cleaning efficiency, simple operation and good cleaning effect. Reliable quality and convenient after-sales service.

Advantage

01. The cleaning plate can be replaced to clean a variety of products, and the cleaning plate products are customized

02. The equipment is easy to operate and more humanized

03. The equipment adopts two fluid cleaning, with high cleaning accuracy, zero damage to the product and minimal pure water consumption

04. Rotary spray bar to avoid secondary pollution of products

05. High speed centrifugal design, speed adjustable 100-3000r / min

06. Equipped with electrostatic elimination device, cavity closed heating device, auxiliary cleaning to achieve the best effect

07. Equipped with two-stage air filtration system, the compressed air complies with ISO8573 1 standard

08. Space saving design with reduced width to reduce the occupied area of dust-free workshop

09. The whole machine is made of stainless steel body, which can withstand acid and alkali, has no pollution to the working environment, and the mirror shell equipment maintenance is easy to clean

10. Completely use ultrapure water for cleaning, meeting Rosh standard

Parameter


Laser power≥15W(Measured about 18W)
Y-axis of linear motorStroke: 450mmStepping:1umResolution:1um
X-axis of linear motorStroke: 650mmStepping:1umResolution:1um
Z axisStroke: 20mmStepping:1umResolution:1um
θ axisStroke: 270°Stepping:0.001°Resolution:0.001°
Machining dimensionMaximum 12inch (300mm)
Scribing modeFull cut / surface grooving


Design sketch

切割效果.jpg

相关标签:硅晶圆

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